This series of equipment includes perovskite solar cells OLED、 Specialized equipment for the research and development of industries such as lithium batteries, quantum dot LEDs, and OPVs, capable of producing nanoscale oxide, nitride, metal, and other thin film materials through manufacturing processes.
This device realizes the evaporation of large-sized perovskite devices and batch evaporation of perovskite devices, greatly improving production and economic benefits.
The sputtering chamber is made of SUS 304 stainless steel material, and the inner surface of the chamber, including the shielding plate, is mirror polished to obtain a clean working environment and good vacuum degree.
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