Magnetron sputtering equipment undertakes the core coating process in high-end manufacturing fields such as semiconductors, flat panel displays, solar cells, and lithium batteries. The size of the substrate that a device can process and the high production capacity it can achieve often depend first and foremost on the size of its vacuum chamber. Because of this, most manufacturers in the industry name their models based on the size of the cavity. When selecting, simply look at the cavity specifications to roughly determine which production line this equipment is suitable for. Below, we will sort out the common types of magnetron sputtering equipment from the perspective of cavity size.
The so-called "distinguishing models based on cavity size" refers to using the diameter, side length, or height of the vacuum cavity as the primary parameters for model classification. Different manufacturers have different habits, some use cavity diameter plus height, such as Φ 1000 × 1250; Some use cavity side lengths, such as 450mm, 530mm, 800mm; Some use a combination of cavity diameter and model code, such as CCZK-700-SF and CCZK-1012-SF. Although the naming rules vary, the core logic is consistent: the cavity size determines the maximum size of the substrate that can be loaded, the number of target positions that can be arranged, and the single batch production capacity.
1、 Small cavity magnetron sputtering equipment
Small cavities generally refer to equipment with a cavity diameter or side length of about 300mm to 600mm. Common specifications include Φ 300 × H450, 400 × 400 × 500, and side length 450mm (450 series). This type of equipment is compact in size and occupies a small area, making it suitable for university laboratories, research institutes, and small-scale research and development trials. It is usually equipped with 2-4 target positions and can perform various processes such as DC, RF, reactive sputtering, etc. The ultimate vacuum degree can generally reach the negative 4th power Pa level of 10. The advantages are low investment cost and easy maintenance, but the disadvantage is that it can only handle small-sized substrates at a time, making it difficult to support large-scale production.
2、 Medium sized cavity magnetron sputtering equipment
Medium sized chambers usually refer to equipment with a diameter or side length between 600mm and 1200mm, such as the 800 series with a diameter or side length of 800mm, etc. This type of equipment balances production capacity and accuracy, and can load large-sized glass substrates or rolls, making it the main model for most industrial production lines. The number of target positions can be expanded to 4-8, supporting multi-layer film and composite film deposition, and can achieve continuous production with automated loading and unloading. For manufacturers pursuing stable yield and high production capacity, medium-sized chambers are often the most cost-effective choice.
3、 Large cavity and roll to roll magnetron sputtering equipment
The diameter of large cavity equipment is usually above 1400mm, such as specifications such as Φ 1400 × 1600, Φ 1600 × 1800, Φ 1800 × 2000, etc. It is mainly used in production scenarios with large area display screens, large format glass, or large batch production capacity. In the field of flexible substrates, specialized large-size roll to roll magnetron sputtering coating machines have also emerged, which introduce the coil into a vacuum chamber and complete the coating in a continuous strip process, suitable for perovskite solar cells OLED、 Industries such as lithium batteries that require large-area and continuous coating. This type of equipment has larger chambers and higher requirements for vacuum sealing, chamber materials, and processing technology.
Taking the roll to roll magnetron sputtering coating machine commonly used in the fields of thin-film solar energy, display, and lithium batteries as an example, in order to ensure the cleanliness and vacuum environment of large-area continuous coating, the chamber is usually made of SUS304 stainless steel, and the inner surface of the chamber and the shielding plate are mirror polished to obtain a clean working environment and good vacuum degree, thereby supporting batch evaporation of large-sized devices and significantly improving production and economic benefits. PowerDe's roll to roll magnetron sputtering coating machine is specifically designed for perovskite solar cells OLED、 Specialized equipment developed and manufactured for industries such as lithium batteries, quantum dot LEDs, and OPVs.
4、 How to choose the appropriate cavity size based on the process
The key to choosing the model of magnetron sputtering equipment is not the bigger the better, but to match it with one's own substrate size, production capacity goals, and process requirements. If only conducting material research and sample testing, a small cavity is sufficient; If entering small-scale mass production, medium-sized cavities are more cost-effective; Once large-scale, continuous coating is required, priority should be given to large chambers or magnetron sputtering coating machines. Before making a decision, it is necessary to confirm the maximum vacuum degree of the chamber, the number of target positions, the type of sputtering power supply, and whether it supports automated wiring. These parameters, together with the chamber size, determine whether the equipment can meet the production line requirements.
In general, the model classification of magnetron sputtering equipment is closely related to the depth of cavity size, ranging from small scientific research machines with a diameter of hundreds of millimeters, to medium-sized production machines with a diameter of over one meter, and to large roll to roll machines for flexible substrates. Each level has its own applicable scenarios. If you are planning a coating production line, you may want to first clarify the substrate specifications and production capacity targets, and then compare the cavity size to screen for suitable magnetron sputtering equipment models. If necessary, you can also directly communicate with the equipment manufacturer for customized solutions.
English
